W coatings
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Journal of Vacuum Science & Technology B 41 pp. 032802-1 - 032802-9 Year: 2023 DOI: 10.1116/6.0002377
Study of process parameters and characteristics properties of W coatings deposited by rf plasma sputtering
Vassallo E.; Pedroni M.; Aloisio M.; Minelli D.; Nardone A.; Chen H.; Pietralunga S.M.; Stinchelli A.; Di Fonzo F.
English
Italiano