{"id":10672,"date":"2024-01-07T17:04:04","date_gmt":"2024-01-07T17:04:04","guid":{"rendered":"https:\/\/www.istp.cnr.it\/?post_type=product&#038;p=10672"},"modified":"2024-01-07T17:04:04","modified_gmt":"2024-01-07T17:04:04","slug":"study-of-process-parameters-and-characteristics-properties-of-w-coatings-deposited-by-rf-plasma-sputtering","status":"publish","type":"product","link":"https:\/\/www.istp.cnr.it\/it\/research-product\/study-of-process-parameters-and-characteristics-properties-of-w-coatings-deposited-by-rf-plasma-sputtering\/","title":{"rendered":"Study of process parameters and characteristics properties of W coatings deposited by rf plasma sputtering"},"content":{"rendered":"<p>Tungsten coatings were deposited on silicon substrates by radio frequency (rf) magnetron sputtering from a metallic target in Ar atmosphere. The process parameters during the sputtering process were evaluated by a Langmuir probe, particularly, the electron density and electron temperature were measured by changing the rf power and gas pressure. The morphological and structural properties of the coatings were studied as a function of the pressure. Significant correlations were found between process parameters and characteristics properties of W coatings. The influence of deposition parameters on electrical properties was investigated. The electrical resistivity of the coatings was increased from 1.3 \u00d7 10-6 to 3 \u00d7 10-5 ? m as the pressure increased as well.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Vassallo E.; Pedroni M.; Aloisio M.; Minelli D.; Nardone A.; Chen H.; Pietralunga S.M.; Stinchelli A.; Di Fonzo F.<\/p>\n","protected":false},"featured_media":1294,"comment_status":"closed","ping_status":"open","template":"","meta":[],"product_cat":[574],"product_tag":[1514,4692],"class_list":["post-10672","product","type-product","status-publish","has-post-thumbnail","hentry","product_cat-journal-articles","product_tag-rf-plasma-sputtering","product_tag-w-coatings","prodpage-style2"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.istp.cnr.it\/it\/wp-json\/wp\/v2\/product\/10672","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.istp.cnr.it\/it\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.istp.cnr.it\/it\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.istp.cnr.it\/it\/wp-json\/wp\/v2\/comments?post=10672"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.istp.cnr.it\/it\/wp-json\/wp\/v2\/media\/1294"}],"wp:attachment":[{"href":"https:\/\/www.istp.cnr.it\/it\/wp-json\/wp\/v2\/media?parent=10672"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.istp.cnr.it\/it\/wp-json\/wp\/v2\/product_cat?post=10672"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.istp.cnr.it\/it\/wp-json\/wp\/v2\/product_tag?post=10672"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}